Absolute positioning by multi-wavelength interferometry referenced to the frequency comb of a femtosecond laser

被引：81

作者：

Wang, Guochao ^{[1
,2
]}

Jang, Yoon-Soo ^{[2
]}

Hyun, Sangwon ^{[2
]}

Chun, Byung Jae ^{[2
]}

Kang, Hyun Jay ^{[2
]}

Yan, Shuhua ^{[1
]}

Kim, Seung-Woo ^{[2
]}

Kim, Young-Jin ^{[2
]}

机构：

[1] Natl Univ Def Technol, Coll Mechatron Engn & Automat, Dept Instrument Sci & Technol, Changsha 410073, Hunan, Peoples R China

[2] Korea Adv Inst Sci & Technol, Dept Mech Engn, Ultrafast Opt Ultraprecis Grp, Taejon 305701, South Korea

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 07期

基金：

新加坡国家研究基金会;

关键词：

DISTANCE MEASUREMENTS; LONG;

D O I：

10.1364/OE.23.009121

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A multi-wavelength interferometer utilizing the frequency comb of a femtosecond laser as the wavelength ruler is tested for its capability of ultra-precision positioning for machine axis control. The interferometer uses four different wavelengths phase-locked to the frequency comb and then determines the absolute position through a multi-channel scheme of detecting interference phases in parallel so as to enable fast, precise and stable measurements continuously over a few meters of axis-travel. Test results show that the proposed interferometer proves itself as a potential candidate of absolute-type position transducer needed for next-generation ultra-precision machine axis control, demonstrating linear errors of less than 61.9 nm in peak-to-valley over a 1-meter travel with an update rate of 100 Hz when compared to an incremental-type He-Ne laser interferometer. (C) 2015 Optical Society of America

引用

页码：9121 / 9129

页数：9

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