Fabrication techniques for three-dimensional metamaterials in the midinfrared

被引:6
作者
Wendt, J. R. [1 ]
Burckel, D. B. [1 ]
Ten Eyck, G. A. [1 ]
Ellis, A. R. [1 ]
Brener, I. [1 ]
Sinclair, M. B. [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2010年 / 28卷 / 06期
关键词
NEGATIVE REFRACTIVE-INDEX; PHOTONIC METAMATERIALS; RESONATORS; LITHOGRAPHY; FREQUENCIES; RESONANCES;
D O I
10.1116/1.3504586
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors have developed two versions of a flexible fabrication technique known as membrane projection lithography that can produce nearly arbitrary patterns in "21/2 D" and fully three-dimensional (3D) structures. The authors have applied this new technique to the fabrication of split ring resonator-based metamaterials in the midinfrared. The technique utilizes electron beam lithography for resolution, pattern design flexibility, and alignment. The resulting structures are nearly three orders of magnitude smaller than equivalent microwave structures that were first used to demonstrate a negative index material. The fully 3D structures are highly isotropic and exhibit both electrically and magnetically excited resonances for incident transverse electromagnetic waves. (C) 2010 American Vacuum Society. [DOI:10.1116/1.3504586]
引用
收藏
页码:C6O30 / C6O33
页数:4
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