Preparation of Hg1-xCdxTe (0.1≤X≤0.5) epitaxial layers by two-stage evaporation-condensation-diffusion method

被引:14
作者
Savitsky, VG [1 ]
Storchun, OP [1 ]
机构
[1] Ivan Franko State Univ, Inst Appl Phys, UA-290044 Lvov, Ukraine
关键词
epitaxial layers; ECD; vapour pressure;
D O I
10.1016/S0040-6090(97)00509-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The present investigation is devoted to the further study of the two-temperature evaporation-condensation-diffusion (ECD) method. Experiments have been performed to determine the Hg vapour pressure influence on rates of HgTe evaporation and condensation, morphological peculiarities of the initial stages of Hgzeta-xCdxTe layer growth, and interdiffusion in the HgTe-CdTe system. It is shown that the classical ECD method for Hg vapour pressures higher than 4 atm becomes inefficient due to the several reasons discussed in this paper. We suggest a two-stage epitaxy process for Hg1-xCdxTe and other solid solutions. In the first stage, a structurally perfect layer with a desired thickness is formed at low Hg pressure. In the second stage, the Hg vapour pressure is fixed. This provides the necessary composition of the layer surface. High-quality Hg1-xCdxTe layers with the surface composition x(s) up to 0.5 are reproducibly obtained by this proposed technique. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:105 / 107
页数:3
相关论文
共 17 条
[1]  
BAILLY F, 1963, CR HEBD ACAD SCI, V257, P103
[2]   TRANSPORT DE MATIERE EN REGIME ISOTHERME PAR COUPLAGE ENTRE UN FLUX DEVAPORATION ET UN FLUX DE DIFFUSION [J].
BAILLY, F ;
MARFAING, Y ;
COHENSOL.G ;
MELNGAILIS, J .
JOURNAL DE PHYSIQUE, 1967, 28 (07) :573-+
[3]   ISOTHERMAL GROWTH OF HGCDTE UNDER CONTROLLED HG VAPOR-PRESSURE [J].
BECLA, P ;
LAGOWSKI, J ;
GATOS, HC ;
JEDRAL, L .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (12) :2855-2857
[4]   PARTIAL PRESSURES OF HG(G) AND TE2(G) IN HG-TE SYSTEM FROM OPTICAL DENSITIES [J].
BREBRICK, RF ;
STRAUSS, AJ .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1965, 26 (06) :989-&
[5]   CROISSANCE EPITAXIQUE DE COMPOSES SEMICONDUCTEURS PAR EVAPORATION-DIFFUSION EN REGIME ISOTHERME [J].
COHENSOL.G ;
MARFAING, Y ;
BAILLY, F .
REVUE DE PHYSIQUE APPLIQUEE, 1966, 1 (01) :11-&
[6]  
COHENSOLAL G, 1967, THESIS PARIS
[7]  
COHENSOLAL G, 1969, EPITACTISCHES WACHIS, P187
[8]   ISOTHERMAL VAPOR-PHASE EPITAXY OF (HG,CD)TE FROM TE-RICH HG1-YTEY SOURCE [J].
DJINOVIC, Z ;
DJURIC, Z ;
JAKSIC, Z ;
KERMENDI, F ;
ROKNIC, R .
JOURNAL OF CRYSTAL GROWTH, 1991, 108 (3-4) :710-718
[9]   A COMPLETE QUANTITATIVE MODEL OF THE ISOTHERMAL VAPOR-PHASE EPITAXY OF (HG,CD)TE [J].
DJURIC, Z ;
DJINOVIC, Z ;
LAZIC, Z ;
PIOTROWSKI, J .
JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (03) :223-228
[10]  
HAGER RJ, 1973, Patent No. 3725135