Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation

被引:177
作者
Okamuro, Kiminori
Hashida, Masaki [1 ]
Miyasaka, Yasuhiro
Ikuta, Yoshinobu
Tokita, Shigeki
Sakabe, Shuji
机构
[1] Kyoto Univ, Inst Chem Res, Adv Res Ctr Beam Sci, Kyoto 6110011, Japan
关键词
TITANIUM; NANOSTRUCTURES; ABLATION; SINGLE; MICROSTRUCTURES; RIPPLES; COPPER;
D O I
10.1103/PhysRevB.82.165417
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Periodic structures self-formed on the surface of several metals under femtosecond laser-pulse irradiation are investigated by electron microscopy. For the self-formation of periodic gratings on metal surfaces, the interspaces of the periodic structures depend on laser fluence. This dependence is the same for all metals, although the range of laser fluence in which the structures are formed differs between metals. The laser fluence dependence can be explained by the generation of a plasma wave through the parametric decay of laser light [S. Sakabe, M. Hashida, S. Tokita, S. Namba, and K. Okamuro, Phys. Rev. B 79, 033409 (2009)]. This indicates that the formation of periodic structures depends not only on metal properties but also on the electron density of plasma produced on a surface by femtosecond laser pulses.
引用
收藏
页数:5
相关论文
共 35 条
[1]   Surface patterning on insulators upon femtosecond laser ablation [J].
Costache, F ;
Henyk, M ;
Reif, J .
APPLIED SURFACE SCIENCE, 2003, 208 :486-491
[2]   Near-damage threshold femtosecond laser irradiation of dielectric surfaces: desorbed ion kinetics and defect dynamics [J].
Costache, Florenta ;
Eckert, Sebastian ;
Reif, Juergen .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 92 (04) :897-902
[3]   Femtosecond laser writing of subwave one-dimensional quasiperiodic nanostructures on a titanium surface [J].
Golosov, E. V. ;
Emel'yanov, V. I. ;
Ionin, A. A. ;
Kolobov, Yu. R. ;
Kudryashov, S. I. ;
Ligachev, A. E. ;
Novoselov, Yu. N. ;
Seleznev, L. V. ;
Sinitsyn, D. V. .
JETP LETTERS, 2009, 90 (02) :107-110
[4]   Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching [J].
Gottmann, Jens ;
Wortmann, Dirk ;
Hoerstmann-Jungemann, Maren .
APPLIED SURFACE SCIENCE, 2009, 255 (10) :5641-5646
[5]   Femtosecond laser ablation of metals: Precise measurement and analytical model for crater profiles [J].
Hashida, M ;
Fujita, M ;
Tsukamoto, M ;
Semerok, AF ;
Gobert, O ;
Petite, G ;
Izawa, Y ;
Wagner, JF .
THIRD INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 4830 :452-457
[6]   Ablation threshold dependence on pulse duration for copper [J].
Hashida, M ;
Semerok, AF ;
Gobert, O ;
Petite, G ;
Izawa, Y ;
Wagner, JF .
APPLIED SURFACE SCIENCE, 2002, 197 :862-867
[7]   Ion emission from a metal surface through a multiphoton process and optical field ionization [J].
Hashida, Masaki ;
Namba, Shin ;
Okamuro, Kiminori ;
Tokita, Shigeki ;
Sakabe, Shuji .
PHYSICAL REVIEW B, 2010, 81 (11)
[8]   Two-dimensional periodic structure induced by single-beam femtosecond laser pulses irradiating titanium [J].
Huang, Yongguang ;
Liu, Shibing ;
Li, Wei ;
Liu, Yuanxing ;
Yang, Wei .
OPTICS EXPRESS, 2009, 17 (23) :20756-20761
[9]   Surface ripple changes during Cr film ablation with a double ultrashort laser pulse [J].
Kim, Jaegu ;
Na, Suckjoo ;
Cho, Sunghak ;
Chang, Wonseok ;
Whang, Kyunghyun .
OPTICS AND LASERS IN ENGINEERING, 2008, 46 (04) :306-310
[10]   Single and multiple shot near-infrared femtosecond laser pulse ablation thresholds of copper [J].
Kirkwood, SE ;
van Popta, AC ;
Tsui, YY ;
Fedosejevs, R .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (04) :729-735