Tunable response nano-mechanical beam resonator

A theoretical proposal is made to dynamically tune the frequency response function of a nano-mechanical beam resonator. The resonator is excited by a magneto-motive drive mechanism. The resonator features multiple drive electrodes with the ability to control the phase and magnitude of the excitation force at each electrode. This nano-resonator behaviour is desirable in the application of MEMS filters. It provides tunable null responses and can increase the relative stability of higher order resonant modes enabling higher operating frequencies. The proposal is supported with the technique of modal analysis and finite element results. (C) 2005 Elsevier B.V. All rights reserved.