Nanoscaled Piezoelectric Aluminum Nitride Contour-Mode Resonant Sensors

被引：4

作者：

Piazza, Gianluca ^{[1
]}

Rinaldi, Matteo ^{[1
]}

Zuniga, Chiara ^{[1
]}

机构：

[1] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA

来源：

2010 IEEE SENSORS | 2010年

关键词：

SYMMETRIC LAMB WAVE; ELECTRONIC NOSE;

D O I：

10.1109/ICSENS.2010.5690615

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on a new class of nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors (CMR-S) that have been developed for the gravimetric detection of volatile organic chemicals (VOC). The use of the CMR-S and its scaling for the making of large arrays of detectors is justified in terms of the superior sensitivity and limit of detection (LOD similar to zg/mu m(2)) that this technology attains with respect to any other available acoustic device. The choice of a novel functionalization layer based on ss-DNA is introduced as an effective way to selectively detect multiple VOCs without altering the electromechanical characteristics of the resonator. Experimental results confirming the advantages of scaling the device dimensions and its frequency of operation in terms of improved LOD and measurement speed are presented. Furthermore, preliminary data showing selective detection of dymethyl-methylphosphonate (DMMP) and dinitroluene (DNT) (with LOD in the order of ppt) are reported.

引用

页码：2202 / 2207

页数：6