Low-temperature sterilization with surface-wave-excited oxygen plasma

Low-temperature plasma sterilization has been experimentally demonstrated using surface-wave plasma excited by a 2.45 GHz microwave.,With the spores of Bacillus stearothermophilus and Bacillus subtilis as biological indicators, we have carried out the plasma sterilization experiments by varying the irradiation period of oxygen plasma discharges. It was experimentally confirmed that the spores with a population of 1.5 x 10(6) were sterilized by irradiating them with oxygen plasma discharges generated with a microwave power of 700 W at a pressure of 60-80 mTorr for 3 min or longer. From the scanning electron microscopy (SEM) analysis of the spores, we found that the sterilized spores clearly had different sizes and shapes compared with those before the plasma irradiation. Furthermore, present experiments suggested that the changes of spore shapes were mainly attributed to the reactive interactions with oxygen radicals.