Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Pulsed Laser Deposition

被引：41
作者：
Al-Riyami, Sausan [1 ]
Ohmagari, Shinya [1 ]
Yoshitake, Tsuyoshi [1 ]
机构：
[1] Kyushu Univ, Dept Appl Sci Elect & Mat, Fukuoka 8168580, Japan
来源：
APPLIED PHYSICS EXPRESS | 2010年 / 3卷 / 11期
关键词：
D O I：
10.1143/APEX.3.115102
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films were deposited by pulsed laser deposition. The film doped with a nitrogen content of 7.9 at.% possessed n-type conduction with an electrical conductivity of 18 Omega(-1) center dot cm(-1) at 300 K. A heterojunction with p-type Si exhibited typical rectifying action. The UNCD grain size was estimated to be 2.5 nm from X-ray diffraction measurement. Near-edge X-ray absorption fine-structure and Fourier transform infrared spectroscopies revealed the preferential formations of C=N and C-N bonds and an enhanced amount of sp(2) bonds in the films. (C) 2010 The Japan Society of Applied Physics
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页数：3
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