One-dimensional Wolter optics with a sub-50 nm spatial resolution

被引：25

作者：

Matsuyama, S. ^{[1
]}

Wakioka, T. ^{[1
]}

Kidani, N. ^{[1
]}

Kimura, T. ^{[1
]}

Mimura, H. ^{[1
]}

Sano, Y. ^{[1
]}

Nishino, Y. ^{[2
]}

Yabashi, M. ^{[3
]}

Tamasaku, K. ^{[3
]}

Ishikawa, T. ^{[3
]}

Yamauchi, K. ^{[1
,4
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan

[2] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010021, Japan

[3] RIKEN SPring 8, Sayo, Hyogo 6795148, Japan

[4] Osaka Univ, Grad Sch Engn, Res Ctr Ultraprecis Sci & Technol, Suita, Osaka 5650871, Japan

来源：

OPTICS LETTERS | 2010年 / 35卷 / 21期

基金：

日本科学技术振兴机构;

关键词：

RAY REFLECTIVE OPTICS; INTERFEROMETRY;

D O I：

10.1364/OL.35.003583

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror [i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50 nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10 mu m slit were conducted at an x-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50 nm over a 12.1 mu m field. (C) 2010 Optical Society of America

引用

页码：3583 / 3585

页数：3

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