Optical and electrical diagnostics of low pressure plasmas

被引:0
|
作者
Mataras, DS [1 ]
Rapakoulias, DE [1 ]
机构
[1] Univ Patras, Dept Chem Engn, Patras 26500, Greece
来源
PLASMA PROCESSING OF POLYMERS | 1997年 / 346卷
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D O I
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中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:65 / 79
页数:15
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