Design considerations for monolithic integration of a micro hotplate temperature controller in a MEMS gas sensor

被引:0
作者
Mendoza-Acevedo, S. [1 ]
Reyes-Barranca, M. A. [1 ]
Flores-Nava, L. M. [1 ]
Avila-Garcia, A. [1 ]
Gonzalez-Vidal, J. L. [2 ]
机构
[1] CINVESTAV IPN, Dept Elect Engn, Mexico City, DF, Mexico
[2] UAEH, Pachuca, Hidalgo, Mexico
来源
2009 6TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATION CONTROL (CCE 2009) | 2009年
关键词
Control; FGMOS; MEMS; Gas sensor; CMOS; MICROSYSTEMS;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor system. A high temperature between 250 and 400 degrees C is needed to produce a chemical reaction between the gas and the sensing film, hence a reliable temperature control for the micro hotplate is desired. Thermal insulation of the circuitry from the heating element, having a monolithic sensor system, and low power consumption, are the main specifications for the system. This is obtained by means of a micro pit realized with MEMS micromachining processes. The analysis of the circuit proposed to fulfill these characteristics is presented, for its future integration with a standard CMOS technology. A trade off is established between the sensor structure parameters and the circuit design.
引用
收藏
页码:256 / +
页数:2
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