Analysis of the structural properties of polycrystalline silicon germanium films

被引：0

作者：

Sedky, S ^{[1
]}

Fiorini, P ^{[1
]}

Loreti, S ^{[1
]}

Caymax, M ^{[1
]}

Baert, K ^{[1
]}

Vanhoof, C ^{[1
]}

机构：

[1] Cairo Univ, Fac Engn, Dept Engn Phys, Giza 12211, Egypt

来源：

ICM'99: ELEVENTH INTERNATIONAL CONFERENCE ON MICROELECTRONICS - PROCEEDINGS | 1999年

关键词：

stress; poly SiGe; surface micromachining;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, poly SiGe is proposed as a suitable material for surface micromachining applications that require a low thermal budget. The effect of the deposition conditions and layer thickness on the structural and mechanical properties of poly SiGe is analyzed by means of transmission electron microscopy (TEM) and X-ray diffraction spectroscopy (XRD). It is demonstrated that using as-grown poly SiGe (deposited at 625 degreesC), a low tensile stress (+60 MPa) and a negligible stress gradient can be achieved.

引用

页码：67 / 70

页数：4

共 10 条

[1] FAN LS, 1988, SOL STAT SENS ACT WO, P55
[2] GEIGER W, 1997, INT C SOL STAT SENS, V2, P1129
[3] KAMINS T, 1988, POLYCRYSTALLINE SILI, pCH2
[4] ELECTRICAL-PROPERTIES OF HEAVILY-DOPED POLYCRYSTALLINE SILICON-GERMANIUM FILMS
KING, TJ
MCVITTIE, JP
SARASWAT, KC
PFIESTER, JR
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (02) : 228 - 232
[5] MAIERSCHNEIDER D, 1995, J MICROMECH MICROENG, V5, P131
[6] MIZUNO J, 1997, INT C SOL STAT SENS, V2, P1197
[7] Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
Sedky, S
Fiorini, P
Caymax, M
Loreti, S
Baert, K
Hermans, L
Mertens, R
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (04) : 365 - 372
[8] Characterization of bolometers based on polycrystalline silicon germanium alloys
Sedky, S
Fiorini, P
Caymax, M
Baert, C
Hermans, L
Mertens, R
[J]. IEEE ELECTRON DEVICE LETTERS, 1998, 19 (10) : 376 - 378
[9] IR bolometers made of polycrystalline silicon germanium
Sedky, S
Fiorini, P
Caymax, M
Verbist, A
Baert, C
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) : 193 - 199
[10] SEDKY S, 1997, INT C SOL STAT SENS, V1, P237

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