Design of zinc oxide-based surface acoustic wave sensors using a graphene electrode

被引：0
作者：
Ogura, Hiroki [1 ]
Takayanagi, Shinji [1 ]
Abe, Koji [1 ]
Rius, Gemma [2 ]
Tanemura, Masaki [1 ]
机构：
[1] Nagoya Inst Technol, Showa Ku, Gokiso Cho, Nagoya, Aichi 4668555, Japan
[2] Ctr Nacl Microelect CSIC, Inst Microelect Barcelona, Campus UAB, Bellaterra 08193, Spain
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / SA期
关键词：
FILMS;
D O I：
10.7567/1347-4065/aaec17
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Continuous monitoring of skin moisture by using a wearable moisture sensor consisting of the materials that have no risk of skin sensitization, such as zinc oxide (ZnO), is essential to optimize the healing process in wound care. Here we tackled the investigation of the optimum electrode for ZnO-based surface acoustic wave (SAW) sensors to achieve this goal. Al and Au electrodes commonly used were compared with a graphene electrode by simulation in terms of the frequency characteristics of the SAW device. Graphene and Al showed the same tendency in frequency characteristics as the 0 thickness electrode (ideal electrode). Since graphene is suitable for flexible devices due to its stretchability and for the long term stability due to its chemical innerness, it was concluded that graphene is more suitable than the conventional Al and Au electrodes for flexible SAW sensor devices. (C) 2018 The Japan Society of Applied Physics
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