Interferometric measurements of small-scale irregularities: highly reflecting surfaces

被引：5

作者：

Hariharan, P ^{[1
]}

机构：

[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 10期

关键词：

interferometry; optical testing; small-scale irregularities; highly reflecting surfaces;

D O I：

10.1117/1.601814

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

With uncoated optical surfaces, it is possible to use a Fizeau interferometer to make direct measurements of small-scale irregularities with very small amplitudes. However, problems arise with highly reflecting surfaces. Some optical systems that can be used for such measurements are described. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)01010-1].

引用

页码：2751 / 2753

页数：3

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