Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition

被引：7

作者：

Do, Hien ^{[1
]}

Yen, Tzu-Chun ^{[1
]}

Tian, Chih-Sheng ^{[1
]}

Wu, Yue-Han ^{[1
]}

Chang, Li ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

来源：

APPLIED SURFACE SCIENCE | 2011年 / 257卷 / 07期

关键词：

Titanium oxycarbide; Epitaxial growth; Pulsed laser deposition; TIC OHMIC CONTACTS; THIN-FILMS; RESIDUAL-STRESS; NITRIDE FILMS; CARBIDE; TEMPERATURE; CARBON; OXIDATION; COATINGS; BEHAVIOR;

D O I：

10.1016/j.apsusc.2010.10.105

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Epitaxial TiCxOy thin films were grown on MgO (0 0 1) substrates by using pulsed laser deposition method. High-resolution X-ray diffraction and transmission electron microscopy were used to examine crystallinity and microstructure of epitaxial TiCxOy film on MgO. The chemical composition of the film is determined to be x similar to 0.47 and y similar to 0.69 by X-ray photoelectron spectroscopy. Atomic force microscopy revealed that the surface of TiCxOy film is very smooth with roughness of 0.18 nm. The resistivity of the TiCxOy film measured by four-point-probe method was about 137 mu Omega cm. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：2990 / 2994

页数：5

共 38 条

[1] X-ray diffraction study of Ti-O-C system at high temperature and in a continuous vacuum [J].

Afir, A ;

Achour, M ;

Saoula, N .

JOURNAL OF ALLOYS AND COMPOUNDS, 1999, 288 (1-2) :124-140

[2] LOW-TEMPERATURE PROCESSING OF TITANIUM NITRIDE FILMS BY LASER PHYSICAL VAPOR-DEPOSITION [J].

BIUNNO, N ;

NARAYAN, J ;

HOFMEISTER, SK ;

SRIVATSA, AR ;

SINGH, RK .

APPLIED PHYSICS LETTERS, 1989, 54 (16) :1519-1521

[3] THERMALLY STABLE, LOW SPECIFIC RESISTANCE (1.30X10(-5)OMEGA-CM(2)) TIC OHMIC CONTACTS TO N-TYPE 6H-ALPHA-SIC [J].

CHADDHA, AK ;

PARSONS, JD ;

KRUAVAL, GB .

APPLIED PHYSICS LETTERS, 1995, 66 (06) :760-762

[4] Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures [J].

Chan, Mu-Hsuan ;

Lu, Fu-Hsing .

SURFACE & COATINGS TECHNOLOGY, 2008, 203 (5-7) :614-618

[5] Influence of ultra-thin YSZ layer on heteroepitaxial CeO2/YSZ/Si(001) films analyzed by X-ray reciprocal space map [J].

Chen, CH ;

Saiki, A ;

Wakiya, N ;

Shinozaki, K ;

Mizutani, N .

JOURNAL OF CRYSTAL GROWTH, 2000, 219 (03) :253-262

[6] Characteristics of titanium nitride films grown by pulsed laser deposition [J].

Chowdhury, R ;

Vispute, RD ;

Jagannadham, K ;

Narayan, J .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (06) :1458-1469

[7]

Chrisey D. B., 1994, Pulsed Laser Deposition of Thin Films

[8] Deposition and some properties of nanocrystalline, nanocomposite and amorphous carbon-based coatings for tribological applications [J].

Czyzniewski, A ;

Precht, W .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2004, 157 :274-283

[9] Plume dynamics in TiC laser ablation [J].

D'Alessio, L ;

Galasso, A ;

Santagata, A ;

Teghil, R ;

Villani, AR ;

Villani, P ;

Zaccagnino, M .

APPLIED SURFACE SCIENCE, 2003, 208 :113-118

[10] MICROSTRUCTURE AND WEAR BEHAVIOR OF METAL-CONTAINING DIAMOND-LIKE COATINGS [J].

DIMIGEN, H ;

KLAGES, CP .

SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3) :543-547

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