(001) preferred oriented CoFe2O4 thin films on glass and Si substrates prepared by the metal-organic decomposition method

It has been reported that cobalt ferrite (CoFe2O4: CFO) thin films prepared on MgO single crystal substrates exhibited high perpendicular magnetic anisotropy. In this paper, we report on (001) preferred oriented CFO thin films prepared on glass and Si substrates using the metal-organic decomposition (MOD) method. It was found that (001) preferred oriented CFO thin films were obtained using pre-annealing temperatures of 310 degrees C-330 degrees C for 30 min, followed by annealing for crystallization at 700 degrees C for 10 h. CFO thin films prepared with various pre-annealing temperatures were evaluated using a magneto-optical spectrometer, X-ray diffraction and electron backscattered diffraction combined with field emission scanning electron microscopy. (C) 2019 The Japan Society of Applied Physics