Mechanism of reverse current increase of vertical-type diamond Schottky diodes

被引:25
作者
Teraji, T. [1 ]
Fiori, A. [1 ,2 ]
Kiritani, N. [3 ]
Tanimoto, S. [3 ,4 ]
Gheeraert, E. [2 ]
Koide, Y. [1 ]
机构
[1] Natl Inst Mat Sci, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan
[2] Univ Grenoble Alpes, CNRS, Grenoble INP, Inst Neel, F-38000 Grenoble, France
[3] Nissan Motor Co Ltd, 1 Natsushima, Yokosuka, Kanagawa 2378523, Japan
[4] Nissan Arc Ltd, 1 Natsushima, Yokosuka, Kanagawa 2370061, Japan
关键词
P-TYPE DIAMOND; ELECTRICAL CHARACTERIZATION; THERMAL-STABILITY; TUNGSTEN CARBIDE; BARRIER DIODES; CONTACT; INTERFACES;
D O I
10.1063/1.4994570
中图分类号
O59 [应用物理学];
学科分类号
摘要
Current transport at p-diamond Schottky contacts under reverse bias operation was investigated. Reverse current transport modes of several types were observed depending on the bias voltage range: thermionic emission (TE) associated with the image force barrier lowering was dominant in the lower voltage range of < 50 V, whereas thermionic-field emission (TFE) mechanism governed transport in the higher voltage range. The Schottky barrier height phi(b) estimated from the reverse characteristics was lower than that obtained from the forward characteristic by more than 0.4 eV, which indicates that the low Schottky barrier height phi(low)(b) area localized in the patch shape at the diamond Schottky contact. This Schottky contact inhomogeneity was found to increase the reverse current effectively even though the phi(low)(b) area is smaller because the reverse current in TE mode flows preferentially through phi(low)(b) patches. The current transport mode changed from TE to TFE when the maximum electric field was > 1MV cm(-1), which indicates that a strong electric field concentration exists at the Schottky electrode fringe. When the high reverse voltage was biased, a sudden current increase occurred, followed by a permanent increase of reverse current, indicating that mid-gap defects were formed at the interface. These results indicate that reverse current and electric-field breakdown have different origins. Published by AIP Publishing.
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页数:8
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共 34 条
[1]   Exceptionally high voltage Schottky diamond diodes and low boron doping [J].
Butler, JE ;
Geis, MW ;
Krohn, KE ;
Lawless, J ;
Deneault, S ;
Lyszczarz, TM ;
Flechtner, D ;
Wright, R .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2003, 18 (03) :S67-S71
[2]   Diamond Schottky diodes with ideality factors close to 1 [J].
Fiori, A. ;
Teraji, T. ;
Koide, Y. .
APPLIED PHYSICS LETTERS, 2014, 105 (13)
[3]   Thermal stabilization and deterioration of the WC/p-type diamond (100) Schottky-barrier interface [J].
Fiori, Alexandre ;
Teraji, Tokuyuki ;
Koide, Yasuo .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2014, 211 (10) :2363-2366
[4]   p-type diamond Schottky diodes fabricated by vacuum ultraviolet light/ozone surface oxidation: Comparison with diodes based on wet-chemical oxidation [J].
Garino, Yiuri ;
Teraji, Tokuyuki ;
Koizumi, Satoshi ;
Koide, Yasuo ;
Ito, Toshimichi .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (09) :2082-2085
[5]   Reverse characteristics of a 4H-SiC Schottky barrier diode [J].
Hatakeyama, T ;
Shinohe, T .
SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS, 2002, 389-3 :1169-1172
[6]   Fabrication of a field plate structure for diamond Schottky barrier diodes [J].
Ikeda, Kazuhiro ;
Umezawa, Hitoshi ;
Tatsumi, Natsuo ;
Ramanujam, Kumaresan ;
Shikata, Shin-ichi .
DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) :292-295
[7]   Imaging of diamond defect sites by electron-beam-induced current [J].
Kono, S. ;
Teraji, T. ;
Kodama, H. ;
Sawabe, A. .
DIAMOND AND RELATED MATERIALS, 2015, 59 :54-61
[8]   Persistent positive and transient absolute negative photoconductivity observed in diamond photodetectors [J].
Liao, Meiyong ;
Koide, Yasuo ;
Alvarez, Jose ;
Imura, Masataka ;
Kleider, Jean-Paul .
PHYSICAL REVIEW B, 2008, 78 (04)
[9]   Crystallographic and electrical characterization of tungsten carbide thin films for Schottky contact of diamond photodiode [J].
Liao, MY ;
Koide, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (01) :185-189
[10]   Thermal stability of diamond photodiodes using tungsten carbide as Schottky contact [J].
Liao, MY ;
Alvarez, J ;
Koide, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (11) :7832-7838