Influence of antiferroelectric-like behavior on tuning properties of ferroelectric HZO-based varactors

被引:5
作者
Abdulazhanov, Sukhrob [1 ]
Lederer, Maximilian [1 ]
Lehninger, David [1 ]
Ali, Tarek [1 ]
Emara, Jennifer [1 ]
Olivo, Ricardo [1 ]
Kaempfe, Thomas [1 ]
机构
[1] Fraunhofer IPMS Ctr Nanoelect Technol CNT, Bartlake 5, D-01109 Dresden, Germany
关键词
D O I
10.1557/s43580-021-00105-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this article, we investigate the capacitance-voltage (C-V) characteristics of HfxZr O-1-x(2) metal-ferroelectric-metal (MFM) thin-film capacitors with various Zr doping for varactor applications. The impact of field cycling during the wake-up process on the capacitance was analyzed. In addition, the effect of antiferroelectric-like (AFE) behavior on tuning was investigated. The transition between ferroelectric (FE) and AFE regime is particularly interesting for varactor application, as a reduced bias is required for tuning. The cycle dependence of the FE and AFE properties at elevated temperatures was also investigated, where it was shown that with an increase of temperature, the tunability is reduced. Temperature measurements also comply with recent studies of ferroelastic nature of AFE behavior.
引用
收藏
页码:530 / 534
页数:5
相关论文
共 50 条
[21]   Antiferroelectric-like Behavior in a Lead-Free Perovskite Layered Structure Ceramic [J].
Zhang, Hangfeng ;
Fortes, A. Dominic ;
Giddens, Henry ;
Saunders, Theo Graves ;
Palma, Matteo ;
Abrahams, Isaac ;
Yan, Haixue ;
Hao, Yang .
INORGANIC CHEMISTRY, 2022, 61 (50) :20316-20325
[22]   Microstructure and antiferroelectric-like behavior of PbxSr1-xTiO3 ceramics [J].
Chen, Hongwei ;
Yang, Chuanren ;
Zhang, Jihua ;
Pei, Yafang ;
Zhao, Zhen .
JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 486 (1-2) :615-620
[23]   Nonlinear antiferroelectric-like capacitance-voltage curves in ferroelectric BiFeO3 thin films [J].
Jiang, A. Q. ;
Zhang, D. W. ;
Tang, T. A. .
JOURNAL OF APPLIED PHYSICS, 2013, 114 (02)
[24]   Antiferroelectric-like behavior of vinylidene fluoride trifluoroethylene copolymers with low vinylidene fluoride content [J].
Takahashi, Y ;
Kodama, H ;
Nakamura, M ;
Furukawa, T ;
Date, M .
POLYMER JOURNAL, 1999, 31 (03) :263-267
[25]   Stabilizing Remanent Polarization during Cycling in HZO-Based Ferroelectric Device by Prolonging Wake-up Period [J].
Jiang, Pengfei ;
Wei, Wei ;
Yang, Yang ;
Wang, Yuan ;
Xu, Yannan ;
Tai, Lu ;
Yuan, Peng ;
Chen, Yuting ;
Gao, Zhaomeng ;
Gong, Tiancheng ;
Ding, Yaxin ;
Lv, Shuxian ;
Dang, Zhiwei ;
Wang, Yan ;
Yang, Jianguo ;
Luo, Qing ;
Liu, Ming .
ADVANCED ELECTRONIC MATERIALS, 2022, 8 (08)
[26]   Antiferroelectric-like behavior of vinylidene fluoride/trifluoroethylene copolymers with low vinylidene fluoride content [J].
Department of Chemistry, Faculty of Science, Science University of Tokyo, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan ;
不详 ;
不详 .
Polym J, 3 (263-267)
[27]   Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films [J].
Ali, Tarek ;
Lehninger, David ;
Lederer, Maximilian ;
Li, Songrui ;
Kuhnel, Kati ;
Mart, Clemens ;
Mertens, Konstantin ;
Hoffmann, Raik ;
Olivo, Ricardo ;
Emara, Jennifer ;
Biedermann, Kati ;
Metzger, Joachim ;
Binder, Robert ;
Czernohorsky, Malte ;
Kampfe, Thomas ;
Muller, Johannes ;
Seidel, Konrad ;
Eng, Lukas M. .
ADVANCED ELECTRONIC MATERIALS, 2022, 8 (05)
[28]   Antiferroelectric-Like Behavior of Vinylidene Fluoride/Trifluoroethylene Copolymers with Low Vinylidene Fluoride Content [J].
Yoshiyuki Takahashi ;
Hidekazu Kodama ;
Masayuki Nakamura ;
Takeo Furukawa ;
Munehiro Date .
Polymer Journal, 1999, 31 :263-267
[29]   Magnetic, Antiferroelectric-like Behavior and Resistance Switching Properties in BiFeO3-CaMnO3 Polycrystalline Thin Films [J].
Lahmar, Abdelilah ;
Zidani, Jacem ;
Belhadi, Jamal ;
Alaoui, Ilham Hamdi ;
Musleh, Hussam ;
Asad, Jehad ;
Al Dahoudi, Naji ;
El Marssi, Mimoun .
MATERIALS, 2023, 16 (23)
[30]   Giant Energy Storage Density with Antiferroelectric-Like Properties in BNT-Based Ceramics via Phase Structure Engineering [J].
Tang, Luomeng ;
Yu, Ziyi ;
Pan, Zhongbin ;
Zhao, Jinghao ;
Fu, Zhenqian ;
Chen, Xiqi ;
Li, Huanhuan ;
Li, Peng ;
Liu, Jinjun ;
Zhai, Jiwei .
SMALL, 2023, 19 (40)