Emission uniformity enhancement between microfabricated tips in cold cathode arrays

被引：19
作者：
Schwoebel, PR
Spindt, CA
Holland, CE
Panitz, JA
机构：
[1] SRI Int, Appl Phys Sci Lab, Menlo Park, CA 94025 USA
[2] Univ New Mexico, Dept Phys & Astron, Albuquerque, NM 87131 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 02期
关键词：
D O I：
10.1116/1.1347041
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The current-voltage characteristics can vary significantly between individual microfabricated tips in as-fabricated arrays of cold cathodes. Such emission nonuniformity is undesirable in device applications. We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity will allow for more reliable array operation at increased electron emission current densities. (C) 2001 American Vacuum Society.
引用
收藏
页码：582 / 584
页数：3
相关论文
共 9 条
  • [1] ACTIVATION ENERGY FOR THE SURFACE MIGRATION OF TUNGSTEN IN THE PRESENCE OF A HIGH-ELECTRIC FIELD
    BETTLER, PC
    CHARBONNIER, FM
    [J]. PHYSICAL REVIEW, 1960, 119 (01): : 85 - 93
  • [2] Developing and using the field emitter as a high intensity electron source
    Charbonnier, F
    [J]. APPLIED SURFACE SCIENCE, 1996, 94-5 : 26 - 43
  • [3] Emission observation of a microtip cathode array with an electrostatic-lens projector: Statistical approach
    Constancias, C
    Baptist, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02): : 841 - 850
  • [4] Dyke W.P., 1956, ADV ELECT ELECTRON P, V8, P89, DOI DOI 10.1016/S0065-2539(08)61226-3
  • [5] Individual tip evaluation in Si field emitter arrays by electrostatic lens projector
    Matsukawa, T
    Kanemaru, S
    Tokunaga, K
    Itoh, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02): : 952 - 955
  • [6] In situ cleaning of microfabricated field emitter cathodes
    Schwoebel, PR
    Olson, RT
    Panitz, JA
    Brodie, AD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (05): : 2579 - 2582
  • [7] SURFACE-SCIENCE ASPECTS OF VACUUM MICROELECTRONICS
    SCHWOEBEL, PR
    BRODIE, I
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (04): : 1391 - 1410
  • [8] SCHWOEBEL PR, IN PRESS J VAC SCI B
  • [9] PHYSICAL-PROPERTIES OF THIN-FILM FIELD-EMISSION CATHODES WITH MOLYBDENUM CONES
    SPINDT, CA
    BRODIE, I
    HUMPHREY, L
    WESTERBERG, ER
    [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (12) : 5248 - 5263
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