Crystallization and electrical properties of Ba0.7Sr0.3TiO3 thin films on SrRuO3/Pt hybrid bottom electrode

被引：5
作者：
Ma, Zhijun [1 ]
Zhang, Tianjin [1 ]
He, Miao [1 ]
Pan, Ruikun [1 ]
Fu, Kai [1 ]
Wang, Jingyang [1 ]
机构：
[1] Hubei Univ, Sch Mat Sci & Engn, Wuhan 430062, Peoples R China
来源：
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2011年 / 22卷 / 01期
关键词：
DIELECTRIC-PROPERTIES; CONDUCTION MECHANISM; LEAKAGE CURRENT; DEPENDENCE;
D O I：
10.1007/s10854-010-0078-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Ba0.7Sr0.3TiO3 (BST) thin films were deposited on Pt and SrRuO3(SRO)/Pt hybrid bottom electrodes by radio frequency magnetron sputtering. X-ray analysis indicated that both films were polycrystalline. Dielectric measurements showed that the films on SRO/Pt hybrid bottom electrode had lower dielectric constant and loss than the films on single Pt and the dielectric properties were frequency-independent. The leakage current density of Ba0.7Sr0.3TiO3 thin films on hybrid bottom electrode was also lower. Leakage mechanism investigations showed that the contact between the electrode-film interfaces of thin films on SRO/Pt hybrid bottom electrode was ohmic. Based on the results, the effects of SRO/Pt hybrid bottom electrode on the crystallization and electrical properties of BST thin films were discussed.
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收藏
页码：35 / 39
页数：5
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