Morphology and oxidation of Zr-based amorphous alloy ablated by femtosecond laser pulses

被引：9
作者：
Wang, Xinlin
Lu, Peixiang [1 ]
Dai, Nengli
Li, Yuhua
Liao, Changrui
Chang, Yanxiao
Yang, Guang
Zheng, Qiguang
机构：
[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab & Optoelect, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Sch Optoelect Sci & Engn, Wuhan 430074, Peoples R China
[3] Nanhua Univ, Sch Elect Engn, Hengyang 421001, Peoples R China
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 89卷 / 02期
关键词：
D O I：
10.1007/s00339-007-4127-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Femtosecond laser ablation of an amorphous alloy in air, including single-pulse ablation, multi-pulse drilling and trenching has been investigated. Laser-induced ablation and related effects were examined by means of scanning electron microscopy, energy dispersive X-ray analysis, transmission electron microscopy and electron diffraction. Oxidation was observed in the multi-pulse ablation region surface. With selected parameters, molten trace, spatter and crystallization can be avoided in the vicinity of the machining area. The results show that femtosecond laser ablation with selected parameters is a promising method for micromachining amorphous alloys.
引用
收藏
页码：547 / 552
页数：6
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