Strain relief at the GaSb/GaAs interface versus substrate surface treatment and AlSb interlayers thickness

被引:39
作者
Wang, Y. [1 ]
Ruterana, P. [1 ]
Desplanque, L. [2 ]
El Kazzi, S. [2 ]
Wallart, X. [2 ]
机构
[1] CNRS ENSICAEN CEA UCBN, CIMAP, UMR 6252, F-14050 Caen, France
[2] CNRS, Inst Elect Microelect & Nanotechnol, UMR 8520, F-59652 Villeneuve Dascq, France
关键词
TRANSMISSION ELECTRON-MICROSCOPY; MOLECULAR-BEAM EPITAXY; COMPOUND SEMICONDUCTORS; MISFIT DISLOCATIONS; GAAS/SI INTERFACE; LOMER DISLOCATION; GASB; GROWTH; CORE; HETEROSTRUCTURES;
D O I
10.1063/1.3532053
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using transmission electron microscopy we investigate the influence of AlSb monolayers and substrate surface preparation on the microstructure of GaSb grown on GaAs (001) by molecular beam epitaxy. The geometric phase analysis method is used to analyze the interface dislocation type and the residual strain, as well as the dislocation core behavior versus the thickness of the AlSb interface layer. A quantitative measurement of the local Burgers vectors shows that the misfit dislocations at the GaSb/GaAs interface are always 60 degrees dislocations. They are arranged in pairs which are more or less distant. For the samples with the lower threading dislocation density, the average distance between the 60 degrees pairs is smaller, the interface is flatter and the local strain is more relieved. These results show that understanding the atomic structure of interfaces may be of great help in improving the quality of GaSb grown on GaAs substrates. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3532053]
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页数:6
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