Picosecond laser scribing of bilayer molybdenum thin films on flexible polyimide substrate

被引：5

作者：

Wang, Zhen ^{[1
]}

Kuk, Seungkuk ^{[1
]}

Kim, Won Mok ^{[2
]}

Jeong, Jeung-hyun ^{[2
]}

Hwang, David J. ^{[1
]}

机构：

[1] SUNY Stony Brook, Dept Mech Engn, Stony Brook, NY 11794 USA

[2] Korea Inst Sci & Technol, Photoelect Hybrids Res Ctr, Seoul 02792, South Korea

来源：

APPLIED SURFACE SCIENCE | 2019年 / 493卷

基金：

新加坡国家研究基金会;

关键词：

CIGS solar cells; Thin-film; Bilayer; Laser scribing; Picosecond laser; BACK CONTACT; STRESS; INTERFACE;

D O I：

10.1016/j.apsusc.2019.06.251

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Molybdenum (Mo) is a commonly used material as the electrical back contact for Cu(In,Ga)Se-2 (CIGS) thin film solar cells taking advantages in electrical, structural and chemical properties. Bilayer structures have been actively examined to achieve Mo films of high conductivity with good substrate adhesion, which will also enable monolithically integrated solar cell modules on flexible platforms by combining laser scribing technology. However, reports on the bilayers on flexible substrates and their scribing by laser are very limited. In this study, we report the characteristics of bilayer Mo films deposited on a flexible polyimide substrate and the impact on the performance of picosecond laser scribing. Bilayer Mo films were deposited over a range of sputtering pressures and discharge powers as well as top-bottom layer thickness ratios, and laser scribing behavior was compared in the practical scribing speed range of the order of m/s. It is shown that microstructural and interfacial characteristics set by top and bottom Mo layers deposition parameters are critical factors influencing laser scribing quality.

引用

页码：320 / 330

页数：11