Optical and structural property change by the thermal decomposition of amorphous platinum oxide film

被引:30
作者
Shima, T [1 ]
Tominaga, J [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, AIST, Ctr Appl Near Field Opt Res, Tsukuba, Ibaraki 3058562, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 6A期
关键词
amorphous platinum oxide; thermal decomposition; super-RENS; refractive index; platinum particles;
D O I
10.1143/JJAP.42.3479
中图分类号
O59 [应用物理学];
学科分类号
摘要
Refractive indices of amorphous platinum oxide film (a-PtO1.1 and a-PtO1.6) at the wavelength of 400 nm and 630 nm are evaluated. A transmittance measurement obtained during heating the film demonstrated an optical property change at 550-600degreesC. X-ray diffraction and Raman scattering measurements confirmed that the change derives from the thermal decomposition of PtOx. Furthermore, Pt particles (diameter: 20-30 nm) are formed when thin PtOx film (thickness: about 4 nm) is thermally decomposed.
引用
收藏
页码:3479 / 3480
页数:2
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