Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy

被引：0

作者：

Higotani, T ^{[1
]}

Kim, MK ^{[1
]}

Takao, T ^{[1
]}

Oki, Y ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka 8128581, Japan

来源：

CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Using the ultraviolet laser ablation, a very thin layer removal of a polymer and a glass was possible by single laser shot. Element analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate sample in combination with the laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.

引用

页码：34 / 35

页数：2