Thermodynamic theory for preferred orientation in materials prepared by energetic condensation

被引:55
作者
McKenzie, DR [1 ]
Bilek, MMM
机构
[1] Univ Sydney, Dept Appl Phys, Sydney, NSW 2006, Australia
[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
vapour phase; thermal energies; elastic strain energy; amorphous carbon;
D O I
10.1016/S0040-6090(00)01702-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, some general observations are made concerning the formation of preferred orientation in thin films deposited from the vapour phase, and also in the case where some of the depositing atoms or ions have greater than thermal energies. As a general principle, we postulate that the structures observed represent a minimum of energy for the set of configurations available to the system. The contributions to the energy arise from surfaces and interfaces as well as from the elastic strain energy in the bulk. The implications of this postulate are studied with reference to the growth of BN and related materials including AIN and amorphous carbon. (C) 2001 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:280 / 287
页数:8
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