Non-contact detection of free flying nanoliter droplets

被引:0
|
作者
Ernst, A. [1 ]
Streule, W.
Zengerle, R.
Koltay, P.
机构
[1] Univ Freiburg, Lab MEMS Applicat, Dept Microsyst Engn IMTEK, Georges Koehler Allee 103, D-79110 Freiburg, Germany
关键词
contact less; capacitive sensor; dispensed liquid;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we present a non-contact droplet sensor that allows for the detection of free flying liquid droplets with diameters in the range of 200-400 mu m. The working principle is based on capacitive detection. The detector was fabricated cost-effectively in standard PCB-technology (printed circuit board) and characterized by experiments: Due to its small dimensions (18 x 56 x 1.6 mm) it can easily be placed into the flight-path of the liquid droplet when the distance between the dispenser and the target is at least 3 mm. The proposed sensor is able to detect any irregularity such as velocity, shape or volume variations in the droplet dispensing process by comparing the actual sensor signal with an average liquid specific "fingerprint". Therefore it is especially suited for online process monitoring in its present form.
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页数:2
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