Soft Magnetic Co-(TiN) Composite Films Realized within a Wide-Range of Cobalt Content

被引：7

作者：

Zhang, Yiwen ^{[1
]}

Ohnuma, Shigehiro ^{[1
,2
]}

Masumoto, Hiroshi ^{[1
]}

机构：

[1] Tohoku Univ, Interdisciplinary Res Ctr, Sendai, Miyagi 982, Japan

[2] Res Inst Electromagnet Mat, Sendai, Miyagi 982, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2011年 / 47卷 / 10期

关键词：

Co-based films; gigahertz frequency; high permeability; soft magnetic materials; thermal stability; TiN matrix; THIN-FILMS; ROOM-TEMPERATURE; FREQUENCY; COERCIVITY; DEPENDENCE;

D O I：

10.1109/TMAG.2011.2156763

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Co-x-(TiN)(1-x) films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x = 45-73 at.%), the Co-x-(TiN)(1-x) nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500 degrees C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.

引用

页码：3795 / 3798

页数：4

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