Angle-resolved Mueller polarimeter using a microscope objective

被引：45
作者：
Ben Hatit, S. [1 ]
Foldyna, M. [1 ]
De Martino, A. [1 ]
Drevillon, B. [1 ]
机构：
[1] Ecole Polytech, LPICM, F-91128 Palaiseau, France
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2008年 / 205卷 / 04期
关键词：
D O I：
10.1002/pssa.200777806
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new Mueller polarimeter based on liquid crystals and a microscope objective is presented for the characterization of diffraction gratings in a conical diffraction mounting. Fast measurements of complete Mueller matrices over a range of polar angles theta (0-60 degrees) and azimuthal angles phi (0-360 degrees) are achieved without mechanical movements. The polarization states generator and analyzer are based on nematic liquid crystals. The angular range is achieved through focalization of light over the measured sample with a microscope objective of high numerical aperture and imaging of the objective's back Fourier plane on a CCD. Results on isotropic samples and diffraction gratings are shown. [GRAPHICS] Mueller matrix and SEM image of a photoresist grating on a crystalline silicon substrate. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：743 / 747
页数：5
相关论文
共 12 条
[1]  
AZZAM RMA, 1986, ELLIPSOMETRY POLARIZ
[2]   General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller-matrix ellipsometers [J].
Compain, E ;
Poirier, S ;
Drevillon, B .
APPLIED OPTICS, 1999, 38 (16) :3490-3502
[3]   Optimized Mueller polarimeter with liquid crystals [J].
De Martino, A ;
Kim, YK ;
Garcia-Caurel, E ;
Laude, B ;
Drévillon, B .
OPTICS LETTERS, 2003, 28 (08) :616-618
[4]   Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring (Vol 455, pg 828, 2004) [J].
Huang, HT ;
Terry, FL .
THIN SOLID FILMS, 2004, 468 (1-2) :338-346
[5]  
Lara Saucedo D., 2005, THESIS IMPERIAL COLL
[6]   Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings [J].
Li, LF .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (05) :1024-1035
[7]   Interpretation of Mueller matrices based on polar decomposition [J].
Lu, SY ;
Chipman, RA .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (05) :1106-1113
[8]  
Macleod H.A., 2001, THIN FILM OPTICAL FI
[9]   Ellipsometric scatterometry for the metrology of sub-0.1-μm-linewidth structures [J].
Minhas, BK ;
Coulombe, SA ;
Naqvi, SSH ;
McNeil, JR .
APPLIED OPTICS, 1998, 37 (22) :5112-5115
[10]   FORMULATION FOR STABLE AND EFFICIENT IMPLEMENTATION OF THE RIGOROUS COUPLED-WAVE ANALYSIS OF BINARY GRATINGS [J].
MOHARAM, MG ;
GRANN, EB ;
POMMET, DA ;
GAYLORD, TK .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1995, 12 (05) :1068-1076
12