Picosecond Mid-IR laser induced surface damage on gallium phosphate (GaP) and calcium Fluoride(CaF2)

被引:21
作者
Lee, Ho [1 ]
机构
[1] Kyungpook Natl Univ, Sch Mech Engn, Taegu 702701, South Korea
关键词
ultra short pulse laser; laser machining; incubation effect; laser-induced ripple;
D O I
10.1007/BF03027657
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Picosecond mid-IR USPL induced Surface damage on a Gallium Phosphate (GaP) and Calcium Fluoride (CaF2) is reported. A semiconductor Gap and a dielectric material CaF2, that are transparent over 3 similar to 10 mu m, were exposed to one picosecond mid-IR light (4.7 mu m) to investigate laser-induced surface morphological changes on the target. The initiation of damage along the polishing scratch line of Gal? and the random location of damage digs on the CaF2, suggests that the mid-IR picosecond laser-induced damage on targets started from intrinsic surface defects. Multiple Pulse irradiations produced periodic corrugated Surface structures (ripples) perpendicular to the polarization of light on both GaP and CaF2. In terms of the orientation and the spacing between ripples, observed ripples have common features with previously reported ripples.
引用
收藏
页码:1077 / 1082
页数:6
相关论文
共 17 条
[1]  
Akhmanov S. A., 1985, Soviet Physics - Uspekhi, V28, P1084, DOI 10.1070/PU1985v028n12ABEH003986
[2]   Laser processing of sapphire with picosecond and sub-picosecond pulses [J].
Ashkenasi, D ;
Rosenfeld, A ;
Varel, H ;
Wahmer, M ;
Campbell, EEB .
APPLIED SURFACE SCIENCE, 1997, 120 (1-2) :65-80
[3]  
BAUERLE D, 2000, LASER PROCESSING CHE, pCH12
[4]   SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS [J].
BIRNBAUM, M .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) :3688-&
[5]  
CHANG W, 2004, J KOREAN SOC MECH EN, V28, P1270
[6]  
Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637
[7]  
Gusev V. E., 1993, LASER OPTOACOUSTICS
[8]   PERIODIC SURFACE-STRUCTURES FROZEN INTO CO2 LASER-MELTED QUARTZ [J].
KEILMANN, F ;
BAI, YH .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (01) :9-18
[9]  
Kittel C., 2018, INTRO SOLID STATE PH
[10]  
Koechner W., 2000, SOLID STATE LASER EN