Multilayer metal-oxide-metal nanopatterns via nanoimprint and strip-off for multispectral resonance

被引：12
作者：
Jeon, Sohee [1 ]
Sung, Sang-Keun [1 ]
Jang, Eun-Hwan [1 ]
Jeong, Junho [1 ]
Surabhi, Srivathsava [2 ,3 ]
Choi, Jun-Hyuk [1 ]
Jeong, Jong-Ryul [2 ,3 ]
机构：
[1] Korea Inst Machinery & Mat, Nanomech Syst Res Div, Daejeon 305343, South Korea
[2] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon 305764, South Korea
[3] Chungnam Natl Univ, Grad Sch Energy Sci & Technol, Daejeon 305764, South Korea
来源：
APPLIED SURFACE SCIENCE | 2018年 / 428卷
基金：
新加坡国家研究基金会;
关键词：
Plasmonic resonance; Nanoimprint; Multilayer transfer; Meta nanostructure; METAMATERIAL; ABSORPTION; FILTER;
D O I：
10.1016/j.apsusc.2017.08.223
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A fabrication technology for multispectral plasmonic resonators is presented on a basis of metal-insulator-metal (MIM) nanopattern arrays. Resonators comprised of MIM nanopatterns were fabricated using nanoimprint-based transfer and strip-off following MIM depositions. Two different kinds of configuration (web and hole) were developed for three and five layers of MIMs. The corresponding measured transmittance and reflectance spectroscopies were compared to their counterpart finite difference time domain (FDTD) simulation results. The results implied various plasmonic resonance couplings occurred at different locations around the metal structures, dependent on the layer and array configuration. By tuning the model geometry and simulation conditions, agreement between the experimental results and simulation was achieved. This work is believed to provide a viable fabrication method for multispectral resonance filters or sensors. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码：280 / 288
页数：9
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