Superconductor-normal-superconductor Josephson junctions fabricated by oxygen implantation into YBa2Cu3O7-δ

被引:35
作者
Kahlmann, F
Engelhardt, A
Schubert, J
Zander, W
Buchal, C
Hollkott, J
机构
[1] Forschungszentrum Julich, Inst Schicht & Ionentech, D-52425 Julich, Germany
[2] Rhein Westfal TH Aachen, Inst Halbleitertech 2, D-52074 Aachen, Germany
关键词
D O I
10.1063/1.122459
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report Josephson junctions in YBa2Cu3O7-delta films, fabricated by oxygen irradiation through a 50 nm wide slit in an implantation mask. After annealing the irradiated microbridges at 500 degrees C in an oxygen atmosphere, this process creates a homogeneous barrier region with a reduced but finite transition temperature, allowing Josephson coupling in a temperature window of less than or equal to 15 K. Over the entire temperature range of Josephson coupling these junctions show resistively shunted junction behavior. The exponential dependence of the critical current on temperature is in good agreement with conventional superconductor-normal-superconductor proximity effect theory. (C) 1998 American Institute of Physics. [S0003-6951(98)01842-7].
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页码:2354 / 2356
页数:3
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