Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application

This study presents a barium titanate (BaTiO3) film-based piezoelectric airflow sensor. This sensor integrated a piezoelectric beam array with a poly(dimethylsiloxane) orifice membrane as the core sensing component. The compact size of the micromachined device fit the requirements for a wearable device. The hydrothermally grown barium titanate film exhibited an orthorhombic crystal structure with good piezoelectric properties. We propose an algorithm to determine the airflow sensor performance using data from the measured piezoelectric signal and the displacement of the piezoelectric beam. This algorithm correlates the discharge coefficient of the core sensing component, Reynold's number, airflow velocity, pressure difference across the component, displacement of the piezoelectric beam, strain of the barium titanate film, and generated charge from the sensor, which is rarely reported in the literature. The Young's modulus and piezoelectric constant of the barium titanate film could also be derived as 100 GPa and 8 pC N-1, respectively. Utilizing this algorithm and the generated piezoelectric signal of the sensor, important breath parameters of a young male subject at rest were monitored.