Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors

被引：22

作者：

Kim, Dong Hwan ^{[1
]}

Jung, Young ^{[1
,3
]}

Jung, Kyungkuk ^{[4
]}

Kwak, Dong Hwa ^{[1
]}

Park, Dong Min ^{[1
]}

Shin, Myung Gyu

Tak, Hyeong Jun ^{[1
,2
]}

Ko, Jong Soo ^{[1
]}

机构：

[1] Pusan Natl Univ, Grad Sch Mech Engn, Busandaehak Ro 63beon Gil, Busan 46241, South Korea

[2] Pusan Natl Univ, Dept Elect Engn, Busandaehak Ro 63beon Gil, Busan 46241, South Korea

[3] Korea Inst Ind Technol, Precis Mfg Control R&D Grp, 42-7 Baegyang Daero 804beon Gil, Busan 46938, South Korea

[4] Korea Marine Equipment Res Inst, Qual & Stand Dept, 435 Haeyang Ro, Busan 49111, South Korea

来源：

MICRO AND NANO SYSTEMS LETTERS | 2020年 / 8卷 / 01期

关键词：

Capacitive pressure sensor; Hollow PDMS foam; Porosity;

D O I：

10.1186/s40486-020-00127-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.

引用

页数：7

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