Synthesis of metal oxide thin films by liquid-phase deposition method

被引：60

作者：

Deki, S

Aoi, Y

机构：

[1] Kobe Univ, Fac Engn, Dept Sci & Chem Engn, Nada Ku, Kobe, Hyogo 657, Japan

[2] Ryukoku Univ, Fac Sci & Technol, Dept Chem Mat, Otsu, Shiga 52021, Japan

来源：

JOURNAL OF MATERIALS RESEARCH | 1998年 / 13卷 / 04期

关键词：

D O I：

10.1557/JMR.1998.0119

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel wet process to synthesize metal oxide thin films has been developed. The process is called the Liquid-Phase Deposition (LPD) method. In this method, metal oxide or hydroxide thin films are formed on the substrate through the ligand-exchanging (hydrolysis) equilibrium reaction of metal-fluoro complex species and the F- consumption reaction of a F- scavenger. The LPD method is a unique soft solution process, and is performed by very simple procedures, In this paper, we develop a method of preparing composite oxide thin films, Pt-dispersed titanium oxide, and iron-nickel binary oxide thin films.

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页码：883 / 890

页数：8

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