First demonstration of X-ray mirrors using focused ion beam

被引：8

作者：

Numazawa, Masaki ^{[1
]}

Ezoe, Yuichiro ^{[1
]}

Ishikawa, Kumi ^{[2
]}

Ogawa, Tomohiro ^{[1
]}

Sato, Mayu ^{[1
]}

Nakamura, Kasumi ^{[1
]}

Takeuchi, Kazuma ^{[1
]}

Terada, Masaru ^{[1
]}

Ohashi, Takaya ^{[1
]}

Mitsuda, Kazuhisa ^{[3
]}

Kelley, Ron ^{[4
]}

Murata, Kaoru ^{[5
]}

机构：

[1] Tokyo Metropolitan Univ, Hachioji, Tokyo 1920397, Japan

[2] RIKEN, 2-1 Hirosawa, Wako, Saitama 3510198, Japan

[3] JAXA, ISAS, Sagamihara, Kanagawa 2525210, Japan

[4] FEI Co, Hillsboro, OR 97124 USA

[5] FEI Japan NanoPort, Minato Ku, Tokyo 1080075, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 06期

关键词：

SILICON-WAFERS; OPTICS;

D O I：

10.7567/JJAP.55.06GP11

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on novel X-ray mirrors fabricated with a focused ion beam for future astronomical missions. We fabricated a test sample from a silicon wafer by forming six slits whose sidewalls were used as X-ray reflection surfaces. The six slits were designed with a size of 25 x 300 x 170 mu m(3) and with different inclination angles of 0 and +/- 1 degrees. We examined X-ray reflection using three slits with different inclination angles at Al K alpha 1.49 keV. Consequently, we demonstrated X-ray reflection from all the three slits. All the sidewalls have multiangular components with a microroughness of similar to 1 nm rms. similar to 30-45% of the total surface area is effective for X-ray reflection. We confirmed that the inclination angles are consistent with the designed values. (C) 2016 The Japan Society of Applied Physics

引用

页数：5

共 50 条

[31] High-quality quasi-parallel X-ray beam obtained by a parabolic monocapillary X-ray lens with a square beam stop
Zhou, Peng
Cui, Jingduo
Du, Zelin
Zhang, Tao
Liu, Zhiguo
JOURNAL OF X-RAY SCIENCE AND TECHNOLOGY, 2022, 30 (02) : 261 - 273
[32] Development of an achromatic full-field hard X-ray microscope using two monolithic imaging mirrors
Matsuyama, S.
Kino, H.
Yasuda, S.
Kohmura, Y.
Okada, H.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
X-RAY NANOIMAGING: INSTRUMENTS AND METHODS II, 2015, 9592
[33] Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors
Matsuyama, S.
Inoue, T.
Yamada, J.
Kim, J.
Yumoto, H.
Inubushi, Y.
Osaka, T.
Inoue, I.
Koyama, T.
Tono, K.
Ohashi, H.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
SCIENTIFIC REPORTS, 2018, 8
[34] The Rocket Experiment Demonstration of a Soft X-ray Polarimeter (REDSoX Polarimeter)
Marshall, Herman L.
Schulz, Norbert S.
Heine, Sarah N. Trowbridge
Heilmann, Ralf K.
Gunther, H. Moritz
Egan, Mark
Hellickson, Tim
Schattenburg, Mark
Chakrabarty, Deepto
Windt, David L.
Gullikson, Eric M.
Ramsey, Brian
Weisskopf, Martin C.
Tagliaferri, Gianpiero
Pareschi, Giovanni
Marscher, Alan
Jorstad, Svetlana
UV, X-RAY, AND GAMMA-RAY SPACE INSTRUMENTATION FOR ASTRONOMY XX, 2017, 10397
[35] Focusing of soft X-ray radiation and characterization of the beam profile enabling X-ray emission spectrometry at nanolayered specimens
Unterumsberger, R.
Mueller, M.
Beckhoff, B.
Hoenicke, P.
Pollakowski, B.
Bjeoumikhova, S.
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2012, 78 : 37 - 41
[36] Short-Period Multilayer X-ray Mirrors for "Water" and "Carbon Windows" Wavelengths
Kopylets, Igor
Devizenko, Oleksander
Zubarev, Evgeniy
Kondratenko, Valeriy
Artyukov, Igor
Vinogradov, Alexander
Penkov, Oleksiy
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2019, 19 (01) : 518 - 531
[37] Progress report on air bearing slumping of thin glass mirrors for x-ray telescopes
Schattenburg, Mark L.
Chalifoux, Brandon
DeTienne, Michael D.
Heilmann, Ralf K.
Zuo, Heng
OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY VII, 2015, 9603
[38] Focusing systems for the generation of X-ray micro beam: An overview
Guilherme, A.
Buzanich, G.
Carvalho, M. L.
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2012, 77 : 1 - 8
[39] Spectral structure of a polycapillary lens shaped X-ray beam
Gogolev, A. S.
Filatov, N. A.
Uglov, S. R.
Hampai, D.
Dabagov, S. B.
JOURNAL OF INSTRUMENTATION, 2018, 13
[40] Speckle-based at-wavelength metrology of X-ray mirrors with super accuracy
Kashyap, Yogesh
Wang, Hongchang
Sawhney, Kawal
REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (05)

← 1 2 3 4 5 →