Fundamentals of electron energy-loss spectroscopy

被引：65
作者：
Hofer, F. [1 ]
Schmidt, F. P.
Grogger, W.
Kothleitner, G.
机构：
[1] Graz Univ Technol, Steyrergasse 17, A-8010 Graz, Austria
来源：
14TH EUROPEAN WORKSHOP ON MODERN DEVELOPMENTS AND APPLICATIONS IN MICROBEAM ANALYSIS (EMAS 2015 WORKSHOP) | 2016年 / 109卷
关键词：
HIGH-RESOLUTION EELS; SURFACE-PLASMONS; IMAGE; MONOCHROMATOR; SCATTERING;
D O I：
10.1088/1757-899X/109/1/012007
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Electron energy-loss spectroscopy (EELS) is an analytical technique that is based on inelastic scattering of fast electrons in a thin specimen. In a transmission electron microscope (TEM) it can provide structural and chemical information about a specimen, even down to atomic resolution. This review provides an overview of the physical basis and new developments and applications of EELS in scanning transmission electron microscopy. Recent advances in elemental mapping, spectrum imaging of plasmonic structures and quantitative analysis of atomically resolved elemental maps are highlighted.
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页数：9
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