Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter

被引：8

作者：

Otani, Yukitoshi ^{[1
]}

Kobayashi, Fumio ^{[1
]}

Mizutani, Yasuhiro ^{[2
,3
]}

Watanabe, Shuugo ^{[4
]}

Harada, Manabu ^{[4
]}

Yoshizawa, Toru

机构：

[1] Utsunomiya Univ, Ctr Opt Res & Educ CORE, Utsunomiya, Tochigi 3218585, Japan

[2] Univ Tokushima, Tokushima 7708506, Japan

[3] Saitama Med Univ, Saitama 3501241, Japan

[4] Malcom Co Ltd, Tokyo 1510071, Japan

来源：

INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS | 2010年 / 7790卷

关键词：

3D surface profile measurement; 3D surface profile measurement with the projection grating; Uni-axis; Digital Sifter; SHAPE;

D O I：

10.1117/12.861561

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A uni-axial measurement of three dimensional surface profiles by a liquid crystal digital shifter is proposed using a telecentric optical system. Height information is captured by measuring the contrast in the projected pattern. A shadow less measurement of the object's area is archived by using a uni-axial system. The magnification of the object image captured by a CCD camera is made constant by changing the focus distance. The liquid crystal digital shifter is a powerful tool to make arbitrary intensity and frequency distribution. Surface profiles of mechanical parts were measured to demonstrate this method.

引用

页数：6

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