Optimal design of a bistable switch

被引：28

作者：

Brenner, MP ^{[1
]}

Lang, JH

Li, J

Qiu, A

Slocum, AH

机构：

[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

[2] MIT, Dept Elect Engn, Cambridge, MA 02139 USA

[3] MIT, Dept Mech Engn, Cambridge, MA 02139 USA

来源：

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA | 2003年 / 100卷 / 17期

关键词：

D O I：

10.1073/pnas.1531507100

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Determining optimally designed structures is important for diverse fields of science and engineering. Here we describe a procedure for calculating the optimal design of a switch and apply the method to a bistable microelectromechanical system relay switch. The approach focuses on characterizing the unstable transition state connecting the two stable equilibria to control the force displacements. Small modifications in component shape lead to a substantial improvement in device operation. Fabrication of the optimized devices confirms the predictions.

引用

页码：9663 / 9667

页数：5

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