Fabrication and error analysis of a InGaAsP/InP polarization beam splitter based on an asymmetric Mach-Zehnder interferometer

被引：4
|
作者：
Pan, Pan [1 ]
Wen, Jun [1 ]
Zha, Shenlong [1 ]
Cai, Xueyuan [1 ]
Ma, Hongliang [1 ]
An, Junming [2 ]
机构：
[1] Anqing Normal Univ, Sch Elect Engn & Intelligent Mfg, Anqing 246133, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
来源：
OPTICAL MATERIALS | 2021年 / 118卷 / 118期
关键词：
Polarization beam splitter; InGaAsP; InP; Ridge waveguide; Asymmetric MZI; Error analysis; TOLERANCE;
D O I：
10.1016/j.optmat.2021.111250
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A polarization beam splitter (PBS) based on an asymmetrical Mach-Zehnder interferometer (MZI) is experimentally demonstrated on a InP platform. The experimental results show that the polarization extinction ratios (PERs) are 8 dB and 14 dB for transverse-electric (TE) and transverse-magnetic (TM) polarization at 1550 nm, respectively. The PER is greater than 5 dB/12 dB for TE/TM polarization over the full C band wavelength range. Fabrication errors including the waveguide width, arm length, film thickness, and sidewall are analyzed using the beam propagation method. The width and sidewall are the most sensitive factors that affect the performances of this type of PBS. This analysis will improve the fabrication tolerance of the PBS.
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页数：8
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