Silicon-polymer hybrid slot waveguide ring-resonator modulator

被引：111

作者：

Gould, Michael ^{[1
]}

Baehr-Jones, Tom ^{[1
]}

Ding, Ran ^{[1
]}

Huang, Su ^{[2
]}

Luo, Jingdong ^{[2
]}

Jen, Alex K. -Y. ^{[2
]}

Fedeli, Jean-Marc ^{[3
]}

Fournier, Maryse ^{[3
]}

Hochberg, Michael ^{[1
]}

机构：

[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

[2] Univ Washington, Dept Mat Sci & Engn, Seattle, WA 98195 USA

[3] CEA LETI, F-38054 Grenoble, France

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 05期

基金：

美国国家科学基金会; 加拿大自然科学与工程研究理事会;

关键词：

ELECTROOPTIC MODULATOR; MICRORING MODULATOR; OPTICAL MODULATION; ON-INSULATOR; COMPACT; SWITCH; DIODE; POWER;

D O I：

10.1364/OE.19.003952

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. The tunability is comparable to some of the best ring-based modulators making use of the plasma dispersion effect. The speed is likely limited only by resistance in the strip-loading section, and it should be possible to realize significant improvement with improved processing. (C) 2011 Optical Society of America

引用

页码：3952 / 3961

页数：10

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