Fundamental aspects to localize self-catalyzed III-V nanowires on silicon

被引:54
作者
Vukajlovic-Plestina, J. [1 ]
Kim, W. [1 ]
Ghisalberti, L. [1 ,2 ,3 ]
Varnavides, G. [2 ,3 ]
Tuetuencuoglu, G. [1 ]
Potts, H. [1 ]
Friedl, M. [1 ]
Gueniat, L. [1 ]
Carter, W. C. [1 ,2 ,3 ]
Dubrovskii, V. G. [4 ]
Fontcuberta i Morral, A. [1 ,5 ]
机构
[1] Ecole Polytech Fed Lausanne, Inst Mat, Lab Semicond Mat, CH-1015 Lausanne, Switzerland
[2] MIT, Dept Mat Sci, Cambridge, MA 02139 USA
[3] MIT, Dept Engn, Cambridge, MA 02139 USA
[4] ITMO Univ, Kronverkskiy Prospekt 49, St Petersburg 197101, Russia
[5] Ecole Polytech Fed Lausanne, Inst Phys, CH-1015 Lausanne, Switzerland
基金
瑞士国家科学基金会; 欧盟地平线“2020”;
关键词
INDIUM-PHOSPHIDE NANOWIRES; GAAS NANOWIRES; CRYSTAL PHASE; GROWTH; NUCLEATION; GOLD;
D O I
10.1038/s41467-019-08807-9
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
III-V semiconductor nanowires deterministically placed on top of silicon electronic platform would open many avenues in silicon-based photonics, quantum technologies and energy harvesting. For this to become a reality, gold-free site-selected growth is necessary. Here, we propose a mechanism which gives a clear route for maximizing the nanowire yield in the self-catalyzed growth fashion. It is widely accepted that growth of nanowires occurs on a layerby-layer basis, starting at the triple-phase line. Contrary to common understanding, we find that vertical growth of nanowires starts at the oxide-substrate line interface, forming a ring-like structure several layers thick. This is granted by optimizing the diameter/height aspect ratio and cylindrical symmetry of holes, which impacts the diffusion flux of the group V element through the well-positioned group III droplet. This work provides clear grounds for realistic integration of III-Vs on silicon and for the organized growth of nanowires in other material systems.
引用
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页数:7
相关论文
共 41 条
[31]  
Tsao J.Y., 1993, FUNDAMENTALS MOL BEA
[32]   Three-Dimensional Multiple-Order Twinning of Self-Catalyzed GaAs Nanowires on Si Substrates [J].
Uccelli, Emanuele ;
Arbiol, Jordi ;
Magen, Cesar ;
Krogstrup, Peter ;
Russo-Averchi, Eleonora ;
Heiss, Martin ;
Mugny, Gabriel ;
Morier-Genoud, Francois ;
Nygard, Jesper ;
Ramon Morante, Joan ;
Fontcuberta i Morral, Anna .
NANO LETTERS, 2011, 11 (09) :3827-3832
[33]   Engineering the Size Distributions of Ordered GaAs Nanowires on Silicon [J].
Vukajlovic-Plestina, Jelena ;
Kim, Wonjong ;
Dubrovski, Vladimir G. ;
Tutuncuoglu, Gozde ;
Lagier, Maxime ;
Potts, Heidi ;
Friedl, Martin ;
Fontcuberta i Morral, Anna .
NANO LETTERS, 2017, 17 (07) :4101-4108
[34]   Molecular beam epitaxy of InAs nanowires in SiO2 nanotube templates: challenges and prospects for integration of III-Vs on Si [J].
Vukajlovic-Plestina, Jelena ;
Dubrovskii, Vladimir G. ;
Tuttncuoglu, Gozde ;
Potts, Heidi ;
Ricca, Ruben ;
Meyer, Frank ;
Matteini, Federico ;
Leran, Jean-Baptiste ;
Fontcuberta i Morral, Anna .
NANOTECHNOLOGY, 2016, 27 (45)
[35]   Position-controlled [100] InP nanowire arrays [J].
Wang, Jia ;
Plissard, Sebastien ;
Hocevar, Moira ;
Vu, Thuy T. T. ;
Zehender, Tilman ;
Immink, George G. W. ;
Verheijen, Marcel A. ;
Haverkort, Jos ;
Bakkers, Erik P. A. M. .
APPLIED PHYSICS LETTERS, 2012, 100 (05)
[36]   Formation of Compositionally Abrupt Axial Heterojunctions in Silicon-Germanium Nanowires [J].
Wen, C. -Y. ;
Reuter, M. C. ;
Bruley, J. ;
Tersoff, J. ;
Kodambaka, S. ;
Stach, E. A. ;
Ross, F. M. .
SCIENCE, 2009, 326 (5957) :1247-1250
[37]   Kinetic Control of Self-Catalyzed Indium Phosphide Nanowires, Nanocones, and Nanopillars [J].
Woo, Robyn L. ;
Gao, Li ;
Goel, Niti ;
Hudait, Mantu K. ;
Wang, Kang L. ;
Kodambaka, Suneel ;
Hicks, Robert F. .
NANO LETTERS, 2009, 9 (06) :2207-2211
[38]   Synthesis parameter space of bismuth catalyzed germanium nanowires [J].
Xiang, Ying ;
Cao, Linyou ;
Arbiol, Jordi ;
Brongersma, Mark L. ;
Fontcuberta i Morral, Anna .
APPLIED PHYSICS LETTERS, 2009, 94 (16)
[39]   Type I band alignment in GaAs81Sb19/GaAs core-shell nanowires [J].
Xu, T. ;
Wei, M. J. ;
Capiod, P. ;
Alvarez, A. Diaz ;
Han, X. L. ;
Troadec, D. ;
Nys, J. P. ;
Berthe, M. ;
Lefebvre, I. ;
Patriarche, G. ;
Plissard, S. R. ;
Caroff, P. ;
Ebert, Ph. ;
Grandidier, B. .
APPLIED PHYSICS LETTERS, 2015, 107 (11)
[40]   Gallium assisted plasma enhanced chemical vapor deposition of silicon nanowires [J].
Zardo, I. ;
Yu, L. ;
Conesa-Boj, S. ;
Estrade, S. ;
Alet, Pierre Jean ;
Roessler, J. ;
Frimmer, M. ;
Roca i Cabarrocas, P. ;
Peiro, F. ;
Arbiol, J. ;
Morante, J. R. ;
Fontcuberta i Morral, A. .
NANOTECHNOLOGY, 2009, 20 (15)