Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition

被引：20

作者：

Taylor, Andrew ^{[1
,2
]}

Drahokoupil, Jan ^{[1
]}

Fekete, Ladislav ^{[1
]}

Klimsa, Ladislav ^{[1
]}

Kopecek, Jaromir ^{[1
]}

Purkrt, Adam ^{[1
]}

Remes, Zdenek ^{[1
,2
]}

Ctvrtlik, Radim ^{[3
]}

Tomastik, Jan ^{[3
]}

Frank, Otakar ^{[4
]}

Janicek, Petr ^{[5
,6
]}

Mistrik, Jan ^{[5
,6
]}

Mortet, Vincent ^{[1
,2
]}

机构：

[1] Acad Sci Czech Republic, Inst Phys, Prague, Czech Republic

[2] Czech Tech Univ, Fac Biomed Engn, Kladno, Czech Republic

[3] Acad Sci Czech Republic, Inst Phys, Joint Lab Opt Palacky Univ & Inst Phys AS CR, Olomouc, Czech Republic

[4] ASCR, J Heyrovsky Inst Phys Chem, Vvi, Prague, Czech Republic

[5] Univ Pardubice, Inst Appl Phys & Math, Fac Chem Technol, Pardubice, Czech Republic

[6] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Pardubice, Czech Republic

来源：

关键词：

Diamond; Silicon carbide; Adherence; Mechanical properties; Optical properties; NANOCRYSTALLINE DIAMOND; CORROSION; COATINGS; POLYTYPES; HARDNESS;

D O I：

10.1016/j.diamond.2016.06.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we detail the properties of thin silicon carbide and polycrystalline diamond layers grown by microwave plasma enhanced chemical vapour deposition with linear antenna delivery. Structural, mechanical and optical properties are compared for their potential use as transparent hard coatings. Silicon carbide layers exhibit mechanical properties comparable to thin diamond layers but with a significantly higher adhesion and lower optical absorption coefficient over a wide spectral range. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：13 / 18

页数：6

共 22 条

[1] MICROHARDNESS AND OTHER PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBIDE THIN-FILMS FORMED BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION [J].

BAYNE, MA ;

KUROKAWA, Z ;

OKORIE, NU ;

ROE, BD ;

JOHNSON, L ;

MOSS, RW .

THIN SOLID FILMS, 1983, 107 (02) :201-206

[2] Micro- and nanomechanical properties of diamond film with various surface morphologies [J].

Bogus, A. ;

Gebeshuber, I. C. ;

Pauschitz, A. ;

Roy, Manish ;

Haubner, R. .

[3] THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .1. MODELING OF HARDNESS BEHAVIOR [J].

BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 148 (01) :41-50

[4] Nano-diamond films produced from CVD of camphor [J].

Chakrabarti, K ;

Chakrabarti, R ;

Chattopadhyay, KK ;

Chaudhuri, S ;

Pal, AK .

[5] Superior hardness and Young's modulus of low temperature nanocrystalline diamond coatings [J].

Cicala, G. ;

Magaletti, V. ;

Senesi, G. S. ;

Carbone, G. ;

Altamura, D. ;

Giannini, C. ;

Bartali, R. .

MATERIALS CHEMISTRY AND PHYSICS, 2014, 144 (03) :505-511

[6] Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system [J].

Fendrych, Frantisek ;

Taylor, Andrew ;

Peksa, Ladislav ;

Kratochvilova, Irena ;

Vlcek, Jan ;

Rezacova, Vladimira ;

Petrak, Vaclav ;

Kluiber, Zdenek ;

Fekete, Ladislav ;

Liehr, Michael ;

Nesladek, Milos .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (37)

[7] Origin of the 1150-cm-1 Raman mode in nanocrystalline diamond -: art. no. 121405 [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2001, 63 (12)

[8]

Fischer-Cripps A.C., 2004, NANOINDENTATION

[9] Structural, mechanical, tribological, and corrosion properties of a-SiC:H coatings prepared by PECVD [J].

Guruvenket, S. ;

Azzi, M. ;

Li, D. ;

Szpunar, J. A. ;

Martinu, L. ;

Klemberg-Sapieha, J. E. .

SURFACE & COATINGS TECHNOLOGY, 2010, 204 (21-22) :3358-3365

[10] Skin/bulk nanostructure and corrosion of SiC-based fibres: a surface Rayleigh and Raman study [J].

Havel, M ;

Colomban, P .

JOURNAL OF RAMAN SPECTROSCOPY, 2003, 34 (10) :786-794

← 1 2 3 →