Spectral response of amorphous-nano-crystalline silicon thin films

被引：21
作者：
Gracin, D. [1 ]
Gajovic, A. [1 ]
Juraic, K. [1 ]
Ceh, M. [2 ]
Remes, Z. [3 ]
Poruba, A. [3 ]
Vanecek, M. [3 ]
机构：
[1] Rudjer Boskovic Inst, Zagreb 10000, Croatia
[2] Jozef Stefan Inst, SI-1000 Ljubljana, Slovenia
[3] Acad Sci Czech Republic, Inst Phys, Prague 16253 6, Czech Republic
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 2008年 / 354卷 / 19-25期
关键词：
silicon; nano-crystals; TEM; optical spectroscopy; photoconductivity; Raman spectroscopy;
D O I：
10.1016/j.jnoncrysol.2007.10.076
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A representative set of amorphous-nano-crystalline Si thin films was deposited by radio-frequency plasma enhanced chemical vapor deposition using silane highly diluted by hydrogen. By Raman spectroscopy it was found that the variation of silane to hydrogen ratio resulted in films with crystal fraction between 0 and 55 vol.% and individual crystal sizes between 2 and 20 nm with bi-modal, broad size distribution. High resolution transmission microscopy, done on certain number of samples, confirmed the nano-meter size of crystallites and bi-modal size distribution. The optical properties measured by Fourier transform photocurrent spectroscopy and photo thermal deflection spectroscopy correspond to the material with structure between amorphous and crystalline. The spectral distribution of relative quantum efficiency of photovoltaic solar cell made from this material shows 'blue shift' with increase of crystal to amorphous fraction. This result is discussed as a possible consequence of quantum effects accompanied with actual size and size distribution of crystals. (c) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：2286 / 2290
页数：5
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