共 62 条
[4]
THE REACTION OF SI(100) 2X1 WITH NO AND NH3 - THE ROLE OF SURFACE DANGLING BONDS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (05)
:1387-1392
[9]
SILICON-NITRIDE THIN-FILM PRODUCTION ON SI(111)
[J].
JOURNAL OF APPLIED PHYSICS,
1993, 73 (10)
:4927-4931