A low-voltage vibratory microgyroscope with ASIC control

被引：0

作者：

Liang, YC ^{[1
]}

Zhao, T ^{[1
]}

Xu, YP ^{[1
]}

Boh, SS ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119260, Singapore

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

microgyroscope; ASIC; comb drive; parallel plate actuation;

D O I：

10.1117/12.425357

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. In addition, a comparison between comb-actuation and parallel-plate actuation was made mathematically to describe the system dynamics clearly. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.

引用

页码：40 / 49

页数：10

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