Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe

被引：20

作者：

Mu, Xiaojing ^{[1
,2
]}

Zhou, Guangya ^{[1
]}

Yu, Hongbin ^{[1
]}

Du, Yu ^{[1
,2
]}

Feng, Hanhua ^{[3
]}

Tsai, Julius Ming Lin ^{[2
]}

Chau, Fook Siong ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Mech Engn, Micro & Nano Syst Initiat Lab, Singapore 117576, Singapore

[2] ASTAR, Inst Microelect, Singapore 117685, Singapore

[3] Temasek Polytech, Temasek Engn Sch, Singapore 529757, Singapore

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 06期

关键词：

BEAM ELECTROTHERMAL ACTUATORS; IN-VIVO; COHERENCE; MICROMIRROR; CATHETER; BEHAVIOR; SILICON;

D O I：

10.1364/OE.20.006325

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection. (C) 2012 Optical Society of America

引用

页码：6325 / 6339

页数：15

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