Constant time interval simulation for semiconductor manufacturing

被引:0
作者
Miyashita, K [1 ]
Ozaki, H [1 ]
Senoh, K [1 ]
Matsuo, H [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, AIST, Tsukuba, Ibaraki 3058564, Japan
来源
ETFA 2003: IEEE CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, VOL 1, PROCEEDINGS | 2003年
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D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
In this paper, we propose an innovative production planning and control methodology, called CONSTIN, and its associated simulation software for large-scale and unstable production environments such as semiconductor manufacturing. CONSTIN presumes to maintain appropriate levels of workin-process inventory (WIP) and move WIP between processes only at a fixed time interval. Our theoretical analysis shows a clear relationship between WIP levels and the time interval in CONSTIN. Computational experiments using a set of realistic wafer fabrication process data show that CONSTIN simulator is comparable in accuracy to a traditional event-driven simulator and can run much faster than that. Therefore, we conclude that CONSTIN is a promising production planning and control methodology and provides a powerful simulation solution to large scale semiconductor manufacturing processes.
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页码:364 / 371
页数:8
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