HYBRID INTEGRATION OF A SHAPE MEMORY ALLOY ACTUATOR FOR MICRO THERMAL MECHANICAL SYSTEMS

被引：0

作者：

Hoffmann, Daniel ^{[1
]}

Pagel, Kenny ^{[2
]}

Spieth, Sven ^{[1
]}

Herrlich, Simon ^{[1
]}

Dehe, Alfons ^{[1
,3
]}

机构：

[1] Hahn Schickard, Villingen Schwenningen, Germany

[2] Fraunhofer Inst IWU, Dresden, Germany

[3] Univ Freiburg, Freiburg, Germany

来源：

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS) | 2022年

关键词：

Hybrid integration; shape memory alloy; thermal actuator; SMA actuator design; phase transformation;

D O I：

10.1109/MEMS51670.2022.9699649

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the hybrid integration of a shape memory alloy (SMA) wire into a micromechanical structure to form a thermal drive system with advanced performance. The SMA wire is utilized as a bending actuator driving a suspended shuttle. This approach allows a cyclic movement with large displacements and forces. Depending on the temperature and the mechanical boundary conditions, the actuator provides maximum displacements of 160 mu m and maximum forces of about 120 mN. Displacement and force of the drive system are adjustable by design of the return spring stiffness and a geometry-defined offset. The influence of spring stiffness, offset and temperature load on the actuator performance is presented. The proposed actuator system enables new applications, for example chip-based energy autonomous detection and counting of thermal thresholds.

引用

收藏

页码：588 / 591

页数：4

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