Theory, modeling and characterization of PZT-on-alumina resonant piezo-layers as acoustic-wave mass sensors

被引：36

作者：

Ferrari, V

Marioli, D

Taroni, A

机构：

[1] Univ Brescia, Dipartimento Elettron & Automazione, I-25123 Brescia, Italy

[2] Univ Brescia, Ist Nazl Fis Mat, I-25123 Brescia, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 92卷 / 1-3期

关键词：

acoustic-wave sensor; mass sensor; equivalent-circuit model; piezoelectric resonator; thick-film sensor;

D O I：

10.1016/S0924-4247(01)00561-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lead zirconate titanate (PZT) films screen-printed on alumina substrate form composite piezoelectric resonators that can be exploited as acoustic-wave mass sensors. The paper presents a theoretical treatment of such layered resonators based on the use of the Mason's model to derive the expression of the distributed-parameter electric impedance, followed by an approximation yielding a lumped-element equivalent circuit valid around the sensor fundamental resonance. Expressions for the resonant frequency and mass sensitivity are obtained, which are validated by experimental results relative to PZT thick-film sensors. The model is of general applicability, provided that the PZT and substrate operate close to their quarter-wave resonance. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：182 / 190

页数：9

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[Anonymous], 1994, THICK FILM SENSORS

[3]

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[4]

Ballantine D.S., 1997, ACOUSTIC WAVE SENSOR